Lub T8 LED daj lub teeb raj yog tsim tshwj xeeb los lim tawm UV thiab xiav Cheebtsam nrogwavelength tsawg dua 500nmrau kev siv UV-photosensible. Arf, Krf, g-, h-, thiab i-line broadband yees duab resists muaj spectral rhiab heev ntawm thaj tsam xiav pom ntawm lub spectrum mus rau ze UV. Repeatable litho-txheej txheem yog rendered nyuaj los ntawm dag dawb lub teeb thiab nruab hnub ci qhov chaw uas muaj wavelengths nyob rau hauv lub photoresists 'rhiab cheeb tsam thiab prematurely nthuav tawm cov resist-coated substrates. Hauv chav photolithography, T8 LED lub teeb daj lub teeb muaj txoj hauv kev lag luam thiab kev cia siab los muab lub teeb pom kev zoo nyob rau lub sijhawm thaum tiv thaiv semiconductor photoresists thiab lwm yam duab emulsions los ntawm UV teeb.
Daj LED raj nrog nruj spectrum tswj tag nrho thaiv tag nrho lub teeb ntawm 0 mus rau 520 nanometers, tsim kom muaj ib puag ncig uas tiv thaiv UV yam tsis muaj kev cuam tshuam qhov tsim nyog illuminance rau tib neeg kom muaj peev xwm ua haujlwm tau zoo.
