Kev tsim cov txheej txheem ntawm LED chips
Lub hom phiaj tseem ceeb ntawm LED nti kev tsim khoom yog tsim cov khoom siv hluav taws xob zoo thiab txhim khu kev qha uas tsis tshua muaj ohmic sib cuag electrodes uas tuaj yeem ua tau raws li qhov tsawg kawg nkaus qhov hluav taws xob poob ntawm cov ntaub ntawv tiv tauj thiab muab cov ntaub qhwv siab rau kev sib txuas ntawm cov xov hlau, thiab tib lub sij hawm ua tau raws li cov teeb pom kev zoo ntau li ntau tau. Cov txheej txheem tseem ceeb yog qhia hauv daim duab 27-1
Kev tshuaj xyuas cov khoom siv Epitaxy
ntxuav
Txheej
photolithography
hlau alloy
lub tsev khaws khoom
Pob
ntes
txiav
txheej txheej txheej feem ntau siv lub tshuab nqus tsev evaporation txoj kev, uas feem ntau yog siv cov cua sov los yog hluav taws xob hluav taws xob foob pob hluav taws xob hauv qab lub tshuab nqus tsev siab ntawm 1.33 * 10-4pa kom yaj cov khoom nyob rau hauv qis qis rau hauv cov hlau vapor thiab tso rau saum npoo ntawm cov khoom siv semiconductor. Feem ntau, P hom yog siv. Cov hlau sib txuas feem ntau suav nrog AuBe, AuZn, thiab lwm yam. Cov hlau tiv tauj ntawm N sab feem ntau siv AuGeNi alloys. Qhov teeb meem feem ntau hauv cov txheej txheem txheej yog kev ntxuav ntawm semiconductor nto ua ntej txheej. Cov txheej txheej tsis muaj zog, thiab txheej txheej txheej txheej txheej txheej txheej txheej yuav tsum tau nthuav tawm ntau npaum li ntawm lub teeb-emitting cheeb tsam li sai tau los ntawm cov txheej txheem photolithography, yog li ntawd cov seem hlau txheej tuaj yeem ua tau raws li qhov yuav tsum tau ua kom zoo thiab txhim khu kev qha low-ohm hu electrodes. thiab cov hlua khi hlua khi. Qhov feem ntau siv cov duab yog lub voj voog. Rau sab nraub qaum, yog tias cov khoom yog pob tshab, lub voj voog yuav tsum tau kos.
Tom qab cov txheej txheem photolithography tiav lawm, yuav tsum muaj txheej txheem alloying. Alloying feem ntau yog ua raws li H2 lossis N2 tiv thaiv. Lub sij hawm thiab qhov kub thiab txias ntawm alloying feem ntau yog nyob ntawm cov khoom ntawm cov khoom siv semiconductor. Cov yam ntxwv xws li daim ntawv ntawm lub qhov cub hluav taws xob txiav txim siab, feem ntau cov alloying kub hauv cov khoom siv liab-daj LED yog nyob nruab nrab ntawm 350 degrees thiab 550 degrees. Tom qab ua tiav alloying, IV nkhaus ntawm ob lub electrodes uas nyob ib sab ntawm lub semiconductor nto feem ntau yog nyob rau hauv ib tug linear kev sib raug zoo. Yog lawm, yog tias cov nti ntsuab ib nrab yog qhov nyuaj hauv cov txheej txheem electrode, kev loj hlob ntawm cov yeeb yaj kiab passivation thiab cov txheej txheem plasma etching yuav tsum tau nce ntxiv.
Cov xim liab thiab daj LED tuag txoj kev zoo ib yam li cov txheej txheem silicon wafer tuag. Feem ntau siv yog pob zeb diamond log hniav. Cov hniav thickness feem ntau yog 25um. Rau cov txheej txheem xiav-ntsuab nti, txij li cov khoom siv substrate yog Al2O3, nws yuav tsum tau khawb nrog pob zeb diamond riam thiab tom qab ntawd tawg.
Lub hauv paus kev tshawb nrhiav ntawm lub teeb-emitting diode nti feem ntau suav nrog kev sim nws qhov kev coj mus rau pem hauv ntej voltage, wavelength, lub teeb siv, thiab cov yam ntxwv rov qab.
Chip tiav ntim feem ntau suav nrog cov ntim zaj duab xis dawb thiab ntim zaj duab xis xiav. Cov pob zaj duab xis dawb feem ntau txuas nrog rau zaj duab xis nrog rau saum npoo ntawm lub ncoo, thiab cov nti sib nrug kuj loj thiab haum rau kev tuav haujlwm. Lub ntim zaj duab xis xiav feem ntau yog glued rau zaj duab xis nyob tom qab. Cov chips me me yog tsim rau automata.
